In situ magneto-optical ellipsometry data analysis for films growth control

Maximova, O. A.; Kosyrev, N. N.; Varnakov, S. N.; Lyaschenko, S. A.; Yakovlev, I. A.; Tarasov, I. A.; Shevtsov, D. V.; Maximova, O. M.; Ovchinnikov, S. G. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 440 196-198; Doi: 10.1016/j.jmmm.2016.12.050 OCT 15 2017

In this work we present the way of ferromagnetic films study by means of magneto-ellipsometry. The method of interpretation of in situ magneto-optical ellipsometry spectra for real time growth control is described. The method has been successfully tested on $Si / {SiO}_{2} / Fe$ films within the model of a homogeneous semi-infinite medium. As a result, the dielectric tensor components for Fe layer were calculated using a developed approach.